Introduction

"Reclaiming" is well-known as an inexpensive source for monitor, test or prime wafers. Since 1991 it has also been available for GaAs and InP. The idea to recycle used wafers is obvious for economic reasons. You get inexpensive wafers with best bulk properties. The only difference to prime material is a thickness loss of few micron. Since all coatings, structures and defects are completely removed the surface has all properties of a prime wafer. Even a repeated reclaiming is no problem.